A 10-MHz FREE-FREE BEAM MICROMECHANICAL RESONATOR FABRICATION PROCESS USING SURFACE-MICROMACHINED TECHNOLOGY

Abstract

The fabrication process for the designed MEMS resonator using surface-micromachined technology is presented in this paper. A 10-MHz Free-Free beam MEMS resonator is designed to vibrate in the second-mode shape, which is significant improvement compare to the fundamental mode. The design showed a Q value as high as 75,000, which is significant improvement compared to 8,400 VHF F-F beam MEMS resonator by K. Wang; and very low motional resistance (18kΩ). The surface-micromachined technology is used as the standard process for the design. The process is briefly described from the layout design to the experimental fabricated device.